Editorial for the Special Issue on Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
نویسندگان
چکیده
Reactive ion etching (RIE) is the dominating technology for micromachining semiconductors with a high aspect ratio (HAR) [...]
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ژورنال
عنوان ژورنال: Micromachines
سال: 2023
ISSN: ['2072-666X']
DOI: https://doi.org/10.3390/mi14081630